IMPROVED PROCESS FOR PRODUCING A DEVICE COMPRISING CAVITIES FORMED BETWEEN A SUSPENDED ELEMENT RESTING ON INSULATING PADS SEMI-BURIED IN A SUBSTRATE AND THIS SUBSTRATE
A method for producing a device including plural cavities defined between a substrate in at least one given semiconductor material and a membrane resting on a top of insulating posts projecting from the substrate, the method allowing a height of the cavity or cavities to be adapted independently of...
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| creator | LARREY, VINCENT POLIZZI, JEAN-PHILIPPE |
| description | A method for producing a device including plural cavities defined between a substrate in at least one given semiconductor material and a membrane resting on a top of insulating posts projecting from the substrate, the method allowing a height of the cavity or cavities to be adapted independently of a height of the insulating posts and allowing cavities of different heights to be formed. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_EP2776364A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>EP2776364A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_EP2776364A13</originalsourceid><addsrcrecordid>eNqNizsOwjAQBdNQIOAOewEKPkpqx37ASokTeZ1QIoRMhSBSuBPXxAlItFRvdzQzTV5c1q5qYSiOhgjtKjfcptFs96TIoGUN0lUUWQamVcueMaplLHP4I2CjK43UsCYyFChhPTmIH5rKEltpCjV-tTJCgpKXeeM46vypc_FOeZCyhvyB5YfmyeR6vvVh8d1ZQjt4fViG7nEKfXe-hHt4nlCvsyzdpFu12vyhvAHlLEaG</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>IMPROVED PROCESS FOR PRODUCING A DEVICE COMPRISING CAVITIES FORMED BETWEEN A SUSPENDED ELEMENT RESTING ON INSULATING PADS SEMI-BURIED IN A SUBSTRATE AND THIS SUBSTRATE</title><source>esp@cenet</source><creator>LARREY, VINCENT ; POLIZZI, JEAN-PHILIPPE</creator><creatorcontrib>LARREY, VINCENT ; POLIZZI, JEAN-PHILIPPE</creatorcontrib><description>A method for producing a device including plural cavities defined between a substrate in at least one given semiconductor material and a membrane resting on a top of insulating posts projecting from the substrate, the method allowing a height of the cavity or cavities to be adapted independently of a height of the insulating posts and allowing cavities of different heights to be formed.</description><language>eng ; fre ; ger</language><subject>FOR PERFORMING MECHANICAL WORK IN GENERAL ; GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL ; METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY ; MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS ; TRANSPORTING</subject><creationdate>2014</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20140917&DB=EPODOC&CC=EP&NR=2776364A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76318</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20140917&DB=EPODOC&CC=EP&NR=2776364A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>LARREY, VINCENT</creatorcontrib><creatorcontrib>POLIZZI, JEAN-PHILIPPE</creatorcontrib><title>IMPROVED PROCESS FOR PRODUCING A DEVICE COMPRISING CAVITIES FORMED BETWEEN A SUSPENDED ELEMENT RESTING ON INSULATING PADS SEMI-BURIED IN A SUBSTRATE AND THIS SUBSTRATE</title><description>A method for producing a device including plural cavities defined between a substrate in at least one given semiconductor material and a membrane resting on a top of insulating posts projecting from the substrate, the method allowing a height of the cavity or cavities to be adapted independently of a height of the insulating posts and allowing cavities of different heights to be formed.</description><subject>FOR PERFORMING MECHANICAL WORK IN GENERAL</subject><subject>GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL</subject><subject>METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>PERFORMING OPERATIONS</subject><subject>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2014</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNizsOwjAQBdNQIOAOewEKPkpqx37ASokTeZ1QIoRMhSBSuBPXxAlItFRvdzQzTV5c1q5qYSiOhgjtKjfcptFs96TIoGUN0lUUWQamVcueMaplLHP4I2CjK43UsCYyFChhPTmIH5rKEltpCjV-tTJCgpKXeeM46vypc_FOeZCyhvyB5YfmyeR6vvVh8d1ZQjt4fViG7nEKfXe-hHt4nlCvsyzdpFu12vyhvAHlLEaG</recordid><startdate>20140917</startdate><enddate>20140917</enddate><creator>LARREY, VINCENT</creator><creator>POLIZZI, JEAN-PHILIPPE</creator><scope>EVB</scope></search><sort><creationdate>20140917</creationdate><title>IMPROVED PROCESS FOR PRODUCING A DEVICE COMPRISING CAVITIES FORMED BETWEEN A SUSPENDED ELEMENT RESTING ON INSULATING PADS SEMI-BURIED IN A SUBSTRATE AND THIS SUBSTRATE</title><author>LARREY, VINCENT ; POLIZZI, JEAN-PHILIPPE</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP2776364A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2014</creationdate><topic>FOR PERFORMING MECHANICAL WORK IN GENERAL</topic><topic>GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL</topic><topic>METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>PERFORMING OPERATIONS</topic><topic>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>LARREY, VINCENT</creatorcontrib><creatorcontrib>POLIZZI, JEAN-PHILIPPE</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>LARREY, VINCENT</au><au>POLIZZI, JEAN-PHILIPPE</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>IMPROVED PROCESS FOR PRODUCING A DEVICE COMPRISING CAVITIES FORMED BETWEEN A SUSPENDED ELEMENT RESTING ON INSULATING PADS SEMI-BURIED IN A SUBSTRATE AND THIS SUBSTRATE</title><date>2014-09-17</date><risdate>2014</risdate><abstract>A method for producing a device including plural cavities defined between a substrate in at least one given semiconductor material and a membrane resting on a top of insulating posts projecting from the substrate, the method allowing a height of the cavity or cavities to be adapted independently of a height of the insulating posts and allowing cavities of different heights to be formed.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre ; ger |
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| subjects | FOR PERFORMING MECHANICAL WORK IN GENERAL GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING |
| title | IMPROVED PROCESS FOR PRODUCING A DEVICE COMPRISING CAVITIES FORMED BETWEEN A SUSPENDED ELEMENT RESTING ON INSULATING PADS SEMI-BURIED IN A SUBSTRATE AND THIS SUBSTRATE |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-09T09%3A26%3A48IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=LARREY,%20VINCENT&rft.date=2014-09-17&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EEP2776364A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |