METHOD FOR MAKING A SILICON SEPARATION MICROCOLUMN FOR CHROMATOGRAPHY OR GAS CHROMATOGRAPHY

A method for the production of a separation microcolumn made in silicon wafer (11), for a chromatographic or gas-chromatographic system, is described. According to the method, a micro-trench (14) is first made in the silicon wafer. The micro-trench extends in depth in the silicon wafer (11) and alon...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GALLI, Stefano, BARAVELLI, Filippo, ELMI, Ivan, BELLUCE, Maddalena, GALLI, Mario, MANCARELLA, Fulvio, ZAMPOLLI, Stefano, POGGI, Antonella, CARDINALI, Giancarlo
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEPARATION TESTING TRANSPORTING
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