SUB-MILLINEWTON CAPACITIVE MEMS FORCE SENSOR FOR MECHANICAL TESTING ON A MICROSCOPE

Most mechanical tests (compression testing, tensile testing, flexure testing, shear testing) of samples in the sub-mm size scale are performed under the observation with an optical microscope or a scanning electron microscope. However, the following problems exist with prior art force sensors as e.g...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DIETZE, WOLFGANG, MUNTWYLER, SIMON, BEYELER, FELIX
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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