Membrane-based sensor device and method for manufacturing the same

A sensing device has a semiconductor substrate (1) with an opening (12) and a membrane (13) spanning the opening (12). A heater (5) is arranged on the membrane (13). To reduce the thermal conductivity of the membrane (13), a recess (17) is etched into the membrane (13) from below.

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Bibliographische Detailangaben
Hauptverfasser:	Kuemin, Cyrill, Hummel, René, Sunier, Robert
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A sensing device has a semiconductor substrate (1) with an opening (12) and a membrane (13) spanning the opening (12). A heater (5) is arranged on the membrane (13). To reduce the thermal conductivity of the membrane (13), a recess (17) is etched into the membrane (13) from below.