Pressure sensor

A pressure sensor has a Si device (130) having a first main surface (130a) that has a bonded area, a second main surface parallel to the first main surface, a pressure-sensitive resistor (131) formed on the first main surface, and a joining assist pattern formed on the first main surface, and a pres...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Mizuno, Takuya, Matsuoka, Toshiyuki, Tsujimura, Yoshinori, Kojima, Takio, Higuchi, Yuzo, Mori, Takashi
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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