PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH PLUG
The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area ((Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane (14) compris...
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| creator | HENNEKEN, Vincent Adrianus MARCELIS, Bout DEKKER, Ronald FRASER, John Douglas LEEUWENSTEIN, Adriaan DIRKSEN, Peter |
| description | The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area ((Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane (14) comprising a hole (15) and an edge portion (14a) surrounding the hole (15), the edge portion (14a) of the membrane (14) being collapsed to the substrate (12). The cell further comprises a plug (30) arranged in the hole (15) of the membrane (14), the plug (30) being located only in a subarea (Asub) of the total membrane area (Atotal). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10). |
| format | Patent |
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The cell further comprises a plug (30) arranged in the hole (15) of the membrane (14), the plug (30) being located only in a subarea (Asub) of the total membrane area (Atotal). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).</description><language>eng ; fre ; ger</language><subject>FOR PERFORMING MECHANICAL WORK IN GENERAL ; GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL ; METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY ; PERFORMING OPERATIONS ; TRANSPORTING</subject><creationdate>2020</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20200408&DB=EPODOC&CC=EP&NR=2747904B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25562,76317</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20200408&DB=EPODOC&CC=EP&NR=2747904B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HENNEKEN, Vincent Adrianus</creatorcontrib><creatorcontrib>MARCELIS, Bout</creatorcontrib><creatorcontrib>DEKKER, Ronald</creatorcontrib><creatorcontrib>FRASER, John Douglas</creatorcontrib><creatorcontrib>LEEUWENSTEIN, Adriaan</creatorcontrib><creatorcontrib>DIRKSEN, Peter</creatorcontrib><title>PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH PLUG</title><description>The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area ((Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane (14) comprising a hole (15) and an edge portion (14a) surrounding the hole (15), the edge portion (14a) of the membrane (14) being collapsed to the substrate (12). The cell further comprises a plug (30) arranged in the hole (15) of the membrane (14), the plug (30) being located only in a subarea (Asub) of the total membrane area (Atotal). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).</description><subject>FOR PERFORMING MECHANICAL WORK IN GENERAL</subject><subject>GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL</subject><subject>METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY</subject><subject>PERFORMING OPERATIONS</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHAMCHLVdfb38XEMCHZ1UXB2DHB09gzxDHNV8PV0DvLX9XV09vD0A8qEBDn6BbuEOrsGKTi7-vgohHuGeCgE-IS68zCwpiXmFKfyQmluBgU31xBnD93Ugvz41OKCxOTUvNSSeNcAI3MTc0sDEydDYyKUAAB-uiqH</recordid><startdate>20200408</startdate><enddate>20200408</enddate><creator>HENNEKEN, Vincent Adrianus</creator><creator>MARCELIS, Bout</creator><creator>DEKKER, Ronald</creator><creator>FRASER, John Douglas</creator><creator>LEEUWENSTEIN, Adriaan</creator><creator>DIRKSEN, Peter</creator><scope>EVB</scope></search><sort><creationdate>20200408</creationdate><title>PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH PLUG</title><author>HENNEKEN, Vincent Adrianus ; MARCELIS, Bout ; DEKKER, Ronald ; FRASER, John Douglas ; LEEUWENSTEIN, Adriaan ; DIRKSEN, Peter</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP2747904B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2020</creationdate><topic>FOR PERFORMING MECHANICAL WORK IN GENERAL</topic><topic>GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL</topic><topic>METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY</topic><topic>PERFORMING OPERATIONS</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>HENNEKEN, Vincent Adrianus</creatorcontrib><creatorcontrib>MARCELIS, Bout</creatorcontrib><creatorcontrib>DEKKER, Ronald</creatorcontrib><creatorcontrib>FRASER, John Douglas</creatorcontrib><creatorcontrib>LEEUWENSTEIN, Adriaan</creatorcontrib><creatorcontrib>DIRKSEN, Peter</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HENNEKEN, Vincent Adrianus</au><au>MARCELIS, Bout</au><au>DEKKER, Ronald</au><au>FRASER, John Douglas</au><au>LEEUWENSTEIN, Adriaan</au><au>DIRKSEN, Peter</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH PLUG</title><date>2020-04-08</date><risdate>2020</risdate><abstract>The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area ((Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane (14) comprising a hole (15) and an edge portion (14a) surrounding the hole (15), the edge portion (14a) of the membrane (14) being collapsed to the substrate (12). The cell further comprises a plug (30) arranged in the hole (15) of the membrane (14), the plug (30) being located only in a subarea (Asub) of the total membrane area (Atotal). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | FOR PERFORMING MECHANICAL WORK IN GENERAL GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY PERFORMING OPERATIONS TRANSPORTING |
| title | PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH PLUG |
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