Capacitive MEMS component with buried transmission line
The system has an electrostatic actuator including a stack (8) having a substrate (4), a radio frequency transmission line (3) along a longitudinal direction, and a dielectric layer (5). Two pillars (2a, 2b) arranged on the stack supports a metal membrane (1), where the upper surface of the stack is...
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| creator | ZIAEI, AFSHIN BANSROPUN, SHAILENDRA LE BAILIFF, MATTHIEU MARTINS, PAOLO |
| description | The system has an electrostatic actuator including a stack (8) having a substrate (4), a radio frequency transmission line (3) along a longitudinal direction, and a dielectric layer (5). Two pillars (2a, 2b) arranged on the stack supports a metal membrane (1), where the upper surface of the stack is planar. The substrate includes a housing (9) in which the transmission line is placed. A passivation layer is located between the substrate and the dielectric layer, where a transverse dimension of the membrane in a direction perpendicular to the longitudinal direction is between 10 and 50 microns. An independent claim is also included for a method for development of a capacitive microelectromechanical system.
L'invention concerne un système micro électromécanique (MEMS) capacitif à actionneur électrostatique comprenant un empilement (8) comprenant un substrat (4), une ligne de transmission de radiofréquences (3) selon une direction longitudinale (d Long ), une couche diélectrique (5), ledit système comprenant en outre deux piliers (2a ; 2b) disposés sur l'empilement (8) supportant une membrane (1) métallique. La surface supérieure de l'empilement (8) est plane. |
| format | Patent |
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L'invention concerne un système micro électromécanique (MEMS) capacitif à actionneur électrostatique comprenant un empilement (8) comprenant un substrat (4), une ligne de transmission de radiofréquences (3) selon une direction longitudinale (d Long ), une couche diélectrique (5), ledit système comprenant en outre deux piliers (2a ; 2b) disposés sur l'empilement (8) supportant une membrane (1) métallique. La surface supérieure de l'empilement (8) est plane.</description><language>eng ; fre ; ger</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SWITCHES ; ELECTRICITY ; EMERGENCY PROTECTIVE DEVICES ; RELAYS ; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE ; SELECTORS ; WAVEGUIDES</subject><creationdate>2014</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20140625&DB=EPODOC&CC=EP&NR=2747190A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76318</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20140625&DB=EPODOC&CC=EP&NR=2747190A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>ZIAEI, AFSHIN</creatorcontrib><creatorcontrib>BANSROPUN, SHAILENDRA</creatorcontrib><creatorcontrib>LE BAILIFF, MATTHIEU</creatorcontrib><creatorcontrib>MARTINS, PAOLO</creatorcontrib><title>Capacitive MEMS component with buried transmission line</title><description>The system has an electrostatic actuator including a stack (8) having a substrate (4), a radio frequency transmission line (3) along a longitudinal direction, and a dielectric layer (5). Two pillars (2a, 2b) arranged on the stack supports a metal membrane (1), where the upper surface of the stack is planar. The substrate includes a housing (9) in which the transmission line is placed. A passivation layer is located between the substrate and the dielectric layer, where a transverse dimension of the membrane in a direction perpendicular to the longitudinal direction is between 10 and 50 microns. An independent claim is also included for a method for development of a capacitive microelectromechanical system.
L'invention concerne un système micro électromécanique (MEMS) capacitif à actionneur électrostatique comprenant un empilement (8) comprenant un substrat (4), une ligne de transmission de radiofréquences (3) selon une direction longitudinale (d Long ), une couche diélectrique (5), ledit système comprenant en outre deux piliers (2a ; 2b) disposés sur l'empilement (8) supportant une membrane (1) métallique. La surface supérieure de l'empilement (8) est plane.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SWITCHES</subject><subject>ELECTRICITY</subject><subject>EMERGENCY PROTECTIVE DEVICES</subject><subject>RELAYS</subject><subject>RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE</subject><subject>SELECTORS</subject><subject>WAVEGUIDES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2014</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDB3TixITM4sySxLVfB19Q1WSM7PLcjPS80rUSjPLMlQSCotykxNUSgpSswrzs0sLs7Mz1PIycxL5WFgTUvMKU7lhdLcDApuriHOHrqpBfnxqcVAM1PzUkviXQOMzE3MDS0NHA2NiVACAG7XLYk</recordid><startdate>20140625</startdate><enddate>20140625</enddate><creator>ZIAEI, AFSHIN</creator><creator>BANSROPUN, SHAILENDRA</creator><creator>LE BAILIFF, MATTHIEU</creator><creator>MARTINS, PAOLO</creator><scope>EVB</scope></search><sort><creationdate>20140625</creationdate><title>Capacitive MEMS component with buried transmission line</title><author>ZIAEI, AFSHIN ; BANSROPUN, SHAILENDRA ; LE BAILIFF, MATTHIEU ; MARTINS, PAOLO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP2747190A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2014</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SWITCHES</topic><topic>ELECTRICITY</topic><topic>EMERGENCY PROTECTIVE DEVICES</topic><topic>RELAYS</topic><topic>RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE</topic><topic>SELECTORS</topic><topic>WAVEGUIDES</topic><toplevel>online_resources</toplevel><creatorcontrib>ZIAEI, AFSHIN</creatorcontrib><creatorcontrib>BANSROPUN, SHAILENDRA</creatorcontrib><creatorcontrib>LE BAILIFF, MATTHIEU</creatorcontrib><creatorcontrib>MARTINS, PAOLO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>ZIAEI, AFSHIN</au><au>BANSROPUN, SHAILENDRA</au><au>LE BAILIFF, MATTHIEU</au><au>MARTINS, PAOLO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Capacitive MEMS component with buried transmission line</title><date>2014-06-25</date><risdate>2014</risdate><abstract>The system has an electrostatic actuator including a stack (8) having a substrate (4), a radio frequency transmission line (3) along a longitudinal direction, and a dielectric layer (5). Two pillars (2a, 2b) arranged on the stack supports a metal membrane (1), where the upper surface of the stack is planar. The substrate includes a housing (9) in which the transmission line is placed. A passivation layer is located between the substrate and the dielectric layer, where a transverse dimension of the membrane in a direction perpendicular to the longitudinal direction is between 10 and 50 microns. An independent claim is also included for a method for development of a capacitive microelectromechanical system.
L'invention concerne un système micro électromécanique (MEMS) capacitif à actionneur électrostatique comprenant un empilement (8) comprenant un substrat (4), une ligne de transmission de radiofréquences (3) selon une direction longitudinale (d Long ), une couche diélectrique (5), ledit système comprenant en outre deux piliers (2a ; 2b) disposés sur l'empilement (8) supportant une membrane (1) métallique. La surface supérieure de l'empilement (8) est plane.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre ; ger |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SWITCHES ELECTRICITY EMERGENCY PROTECTIVE DEVICES RELAYS RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE SELECTORS WAVEGUIDES |
| title | Capacitive MEMS component with buried transmission line |
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