METHOD AND ARRANGEMENT FOR OPERATING A DYNAMIC NANO FOCUSING SYSTEM

The invention relates to a method and to an arrangement for operating a dynamic nano focusing system for use thereof in the field of microscopy, interferometry or similar applications, wherein the nano focusing system comprises a lever-transmission piezo actuator and a frictionless guide based on a...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	MARTH, Harry
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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