MULTI-VANE THROTTLE VALVE
A multi-vane throttling valve for a vacuum process chamber includes a throttle chamber body having an inside exposed to the vacuum process chamber and an outside exposed to atmospheric pressure, the chamber body defining a through-opening for controlling vacuum within the vacuum process chamber, a p...
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| creator | SIN, PHENG |
| description | A multi-vane throttling valve for a vacuum process chamber includes a throttle chamber body having an inside exposed to the vacuum process chamber and an outside exposed to atmospheric pressure, the chamber body defining a through-opening for controlling vacuum within the vacuum process chamber, a plurality of rotatable vanes mounted within the through-opening for controlling a flow of gases through the through-opening where each rotatable vane includes a cooling flow pathway in fluid communication with and disposed longitudinally along each rotatable vane, and a drive mechanism disposed on and connected to an outside of the throttle chamber body for rotating the plurality of rotatable vanes to vary the flow of process gases. |
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fre ; ger</language><subject>ACTUATING-FLOATS ; BLASTING ; COCKS ; DEVICES FOR VENTING OR AERATING ; ENGINEERING ELEMENTS AND UNITS ; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS ; HEATING ; LIGHTING ; MECHANICAL ENGINEERING ; TAPS ; THERMAL INSULATION IN GENERAL ; VALVES ; WEAPONS</subject><creationdate>2016</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20160504&DB=EPODOC&CC=EP&NR=2734758B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,778,883,25547,76298</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20160504&DB=EPODOC&CC=EP&NR=2734758B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SIN, PHENG</creatorcontrib><title>MULTI-VANE THROTTLE VALVE</title><description>A multi-vane throttling valve for a vacuum process chamber includes a throttle chamber body having an inside exposed to the vacuum process chamber and an outside exposed to atmospheric pressure, the chamber body defining a through-opening for controlling vacuum within the vacuum process chamber, a plurality of rotatable vanes mounted within the through-opening for controlling a flow of gases through the through-opening where each rotatable vane includes a cooling flow pathway in fluid communication with and disposed longitudinally along each rotatable vane, and a drive mechanism disposed on and connected to an outside of the throttle chamber body for rotating the plurality of rotatable vanes to vary the flow of process gases.</description><subject>ACTUATING-FLOATS</subject><subject>BLASTING</subject><subject>COCKS</subject><subject>DEVICES FOR VENTING OR AERATING</subject><subject>ENGINEERING ELEMENTS AND UNITS</subject><subject>GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS</subject><subject>HEATING</subject><subject>LIGHTING</subject><subject>MECHANICAL ENGINEERING</subject><subject>TAPS</subject><subject>THERMAL INSULATION IN GENERAL</subject><subject>VALVES</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2016</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJD0DfUJ8dQNc_RzVQjxCPIPCfFxVQhz9Alz5WFgTUvMKU7lhdLcDApuriHOHrqpBfnxqcUFicmpeakl8a4BRubGJuamFk6GxkQoAQDkvB_I</recordid><startdate>20160504</startdate><enddate>20160504</enddate><creator>SIN, PHENG</creator><scope>EVB</scope></search><sort><creationdate>20160504</creationdate><title>MULTI-VANE THROTTLE VALVE</title><author>SIN, PHENG</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP2734758B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2016</creationdate><topic>ACTUATING-FLOATS</topic><topic>BLASTING</topic><topic>COCKS</topic><topic>DEVICES FOR VENTING OR AERATING</topic><topic>ENGINEERING ELEMENTS AND UNITS</topic><topic>GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS</topic><topic>HEATING</topic><topic>LIGHTING</topic><topic>MECHANICAL ENGINEERING</topic><topic>TAPS</topic><topic>THERMAL INSULATION IN GENERAL</topic><topic>VALVES</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>SIN, PHENG</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SIN, PHENG</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MULTI-VANE THROTTLE VALVE</title><date>2016-05-04</date><risdate>2016</risdate><abstract>A multi-vane throttling valve for a vacuum process chamber includes a throttle chamber body having an inside exposed to the vacuum process chamber and an outside exposed to atmospheric pressure, the chamber body defining a through-opening for controlling vacuum within the vacuum process chamber, a plurality of rotatable vanes mounted within the through-opening for controlling a flow of gases through the through-opening where each rotatable vane includes a cooling flow pathway in fluid communication with and disposed longitudinally along each rotatable vane, and a drive mechanism disposed on and connected to an outside of the throttle chamber body for rotating the plurality of rotatable vanes to vary the flow of process gases.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre ; ger |
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| source | esp@cenet |
| subjects | ACTUATING-FLOATS BLASTING COCKS DEVICES FOR VENTING OR AERATING ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS |
| title | MULTI-VANE THROTTLE VALVE |
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