Hermetically Glass Sealed Pressure Sensor
Techniques disclosed herein include systems and methods for pressure measurement of fluids including vehicular fluids. The pressure sensor includes a microelectromechanical system (MEMS) sensor (130) for pressure measurement. The MEMS sensor (130) is attached to a glass tube (120)which is compressiv...
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| creator | VAN DEN BOSCH, ARNOUT KLAASSE HOPMAN, WICO HOP, ERIK SLAAKHORST |
| description | Techniques disclosed herein include systems and methods for pressure measurement of fluids including vehicular fluids. The pressure sensor includes a microelectromechanical system (MEMS) sensor (130) for pressure measurement. The MEMS sensor (130) is attached to a glass tube (120)which is compressively sealed to a mounting frame (105) that is attachable to a pressure port of a fluid-containing enclosure. Techniques disclosed herein provide an hermetic seal between the tube (120) and the mounting frame and a rigid seal (140) between the MEMS sensor to a pressure sensor while decoupling thermal expansion stress from the MEMS sensor. With such decoupling techniques, pressure sensing reliability and accuracy can be improved because thermal expansion stress is decoupled from the MEMS sensor. Such techniques provide an accurate, durable, and cost-effective pressure sensor. |
| format | Patent |
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The pressure sensor includes a microelectromechanical system (MEMS) sensor (130) for pressure measurement. The MEMS sensor (130) is attached to a glass tube (120)which is compressively sealed to a mounting frame (105) that is attachable to a pressure port of a fluid-containing enclosure. Techniques disclosed herein provide an hermetic seal between the tube (120) and the mounting frame and a rigid seal (140) between the MEMS sensor to a pressure sensor while decoupling thermal expansion stress from the MEMS sensor. With such decoupling techniques, pressure sensing reliability and accuracy can be improved because thermal expansion stress is decoupled from the MEMS sensor. 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| language | eng ; fre ; ger |
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| subjects | GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TESTING |
| title | Hermetically Glass Sealed Pressure Sensor |
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