COMPOSITE TARGET

A sputtering target that includes at least two consolidated blocks, each block including an alloy including molybdenum in an amount greater than about 30 percent by weight and at least one additional alloying ingredient; and a joint between the at least two consolidated blocks, the joint being free...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ROZAK, Gary, Alan, GAYDOS, Mark, E
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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