SHARED MEMBRANE THERMOPILE SENSOR ARRAY
A thermopile sensor array is provided. The thermopile sensor array may include multiple pixels formed by multiple thermopiles arranged on a single common shared support membrane. A separation between the edge of the shared support membrane and the outermost thermopile(s) may be included to provide a...
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| creator | KARAGOEZOGLU, Hermann MARINESCU, Radu, M BARLOW, Arthur, J PLOTZ, Fred JU, Jin, Han |
| description | A thermopile sensor array is provided. The thermopile sensor array may include multiple pixels formed by multiple thermopiles arranged on a single common shared support membrane. A separation between the edge of the shared support membrane and the outermost thermopile(s) may be included to provide additional thermal isolation between the thermopile and an underlying silicon substrate. |
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| language | eng ; fre ; ger |
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| subjects | COLORIMETRY ELECTRICITY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING |
| title | SHARED MEMBRANE THERMOPILE SENSOR ARRAY |
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