COMPOSITE SUBSTRATE, ELECTRONIC COMPONENT, AND PRODUCTION METHODS FOR COMPOSITE SUBSTRATE AND ELECTRONIC COMPONENT

A composite substrate having silicon substrate with excellent crystallinity and a method of manufacturing the composite substrate and an electronic component using the composite substrate are provided. A composite substrate (1) is configured to bond a support substrate (10) having electrical insulat...

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Bibliographische Detailangaben

1. Verfasser:	KITADA, MASANOBU
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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