SENSOR ELEMENT AND A METHOD FOR DETECTING A PARAMETER OF A GAS MIXTURE IN A GAS CHAMBER

A sensor element for detecting a parameter of a gas mixture in a gas chamber, having a first electrode and a first diffusion barrier layer arranged to be coupled to said first electrode in a predetermined first region, and arranged such that the gas mixture of the gas chamber only impinges on the fi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WILDGEN, ANDREAS, REITMEIER, TORSTEN
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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