METHOD FOR PRODUCING A SOLAR CELL

METHOD FOR PRODUCING A SOLAR CELL

The invention relates to a method for producing a solar cell, which has an emitter region produced by means of a first doping process in the entire substrate surface of a semiconductor substrate, in particular including edges, a base contact region produced by means of an overcompensating second dop...

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Hauptverfasser: MEYER, KARSTEN, WUETHERICH, TOBIAS, JESSWEIN, REIK
Format: Patent
Sprache:eng ; fre ; ger
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator MEYER, KARSTEN
WUETHERICH, TOBIAS
JESSWEIN, REIK
description The invention relates to a method for producing a solar cell, which has an emitter region produced by means of a first doping process in the entire substrate surface of a semiconductor substrate, in particular including edges, a base contact region produced by means of an overcompensating second doping process, and an isolation trench, which penetrates the depth of the emitter region, in order to electrically isolate the emitter region from the base contact region, wherein in order to form the isolation trench, a masking layer is structured by means of laser-assisted local removal in order to trace the isolation trench and the isolation trench is etched into the surface of the emitter region by means of the structured mask.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title METHOD FOR PRODUCING A SOLAR CELL
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