METHOD FOR LOADING AND UNLOADING A CASSETTE

The present invention relates to a method for loading and unloading a cassette which is used, for example, in plasma coating processes, wherein the following method steps are carried out: a. providing a cassette (1) which can be assembled and disassembled using a disassembly and assembly robot, b. a...

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Bibliographische Detailangaben
Hauptverfasser:	ZITZMANN, ADOLF, ZIMMERMANN, JOSEF, SCHILP, MICHAEL
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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