DEVICE FOR PRODUCING AN ELECTRON BEAM

Device for producing an electron beam includes a housing, which delimits a space that is evacuatable and has an electron beam outlet opening; an inlet structured and arranged for feeding process gas into the space; and a planar cathode and an anode, which are arranged in the space, and between which...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FLASKE, HENRIK, WEISKE, DIETER, FEINÄUGLE, PETER, KIRCHHOFF, VOLKER, ZEIBE, RAINER, MATTAUSCH, GÖSTA
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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