ROTARY ENCODER, ROTARY MOTOR AND ROTARY MOTOR SYSTEM
It is an object to provide a rotary encoder, a rotary motor, and a rotary motor system capable of detecting an origin of a position with detection accuracy improved by using diffraction interference light and of facilitating downsizing and manufacturing, for example. To achieve the object, the encod...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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