Polysilicon deposition

A method and process for the production of bulk polysilicon by chemical vapor deposition (CVD) where conventional silicon "slim rods" commonly used in Siemens-type reactors are replaced with shaped silicon filaments of similar electrical properties but larger surface areas, such as silicon...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PARTHASARATHY, SANTHANA RAGHAVAN, WAN, YUEPENG DR, CHARTIER, CARL, SERVINI, ADRIAN, KHATTAK, CHANDRA P
Format: Patent
Sprache:eng ; fre ; ger
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