FORCE SENSOR AND METHOD OF MANUFACTURING THE SAME

Provided are a force sensor and a method of manufacturing the force sensor in which distortion of substrates due to residual stress after joining of substrates can be decreased, and with which the yield can be improved. A sensor substrate includes a plurality of piezoresistance elements. The electri...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GOCHOU, Hideki, HIRAYAMA, Motoki, UMETSU, Eiji, ISHIZONE, Masahiko
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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