ANTI-REFLECTIVE COATINGS AND METHODS OF MAKING THE SAME

The present invention is directed to anti-reflective coatings and methods of making the same. More specifically, the present invention is directed to porosity graded anti-reflective coatings that are made by methods that comprise preparing a liquid composition with specific amounts of tetraethyl ort...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OUDARD, Jean-francois, LECOLLEY, Francois
Format: Patent
Sprache:eng ; fre ; ger
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