Lpp euv light source drive laser system

A laser produced plasma EUV system comprising: a drive laser producing a drive laser beam (172); a drive laser beam first path having a first axis; a driver laser redirecting mechanism (170) transferring the drive laser beam from the first path to a second path, the second path having a second axis;...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ERSHOV, ALEXANDER, I, BYKANOV, ALEXANDER, N, FOMENKOV, IGOR, V, KHODYKIN, OLEH
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY X-RAY TECHNIQUE
Online-Zugang:	Volltext bestellen
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