Lpp euv light source drive laser system

Lpp euv light source drive laser system

A laser produced plasma EUV system comprising: a drive laser producing a drive laser beam (172); a drive laser beam first path having a first axis; a driver laser redirecting mechanism (170) transferring the drive laser beam from the first path to a second path, the second path having a second axis;...

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Hauptverfasser: ERSHOV, ALEXANDER, I, BYKANOV, ALEXANDER, N, FOMENKOV, IGOR, V, KHODYKIN, OLEH
Format: Patent
Sprache:eng ; fre ; ger
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ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
X-RAY TECHNIQUE
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creator ERSHOV, ALEXANDER, I
BYKANOV, ALEXANDER, N
FOMENKOV, IGOR, V
KHODYKIN, OLEH
description A laser produced plasma EUV system comprising: a drive laser producing a drive laser beam (172); a drive laser beam first path having a first axis; a driver laser redirecting mechanism (170) transferring the drive laser beam from the first path to a second path, the second path having a second axis; an EUV collector optical element (30) having a centrally located aperture; a focusing mirror (180) in the second path and positioned within the aperture and focusing the drive laser beam onto a plasma initiation site (28) located along the second axis.
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subjects ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
X-RAY TECHNIQUE
title Lpp euv light source drive laser system
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