Lpp euv light source drive laser system
A laser produced plasma EUV system comprising: a drive laser producing a drive laser beam (172); a drive laser beam first path having a first axis; a driver laser redirecting mechanism (170) transferring the drive laser beam from the first path to a second path, the second path having a second axis;...
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| Hauptverfasser: | , , , |
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| Format: | Patent |
| Sprache: | eng ; fre ; ger |
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| Online-Zugang: | Volltext bestellen |
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| Zusammenfassung: | A laser produced plasma EUV system comprising: a drive laser producing a drive laser beam (172); a drive laser beam first path having a first axis; a driver laser redirecting mechanism (170) transferring the drive laser beam from the first path to a second path, the second path having a second axis; an EUV collector optical element (30) having a centrally located aperture; a focusing mirror (180) in the second path and positioned within the aperture and focusing the drive laser beam onto a plasma initiation site (28) located along the second axis. |
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