PHOTOCURABLE TRANSFER SHEET, AND METHOD FOR FORMING RECESSED AND PROJECTED PATTERN USING SAME

The present invention is to provide a photo-curable transfer sheet suitable for the preparation of an intermediate stamper in a nanoimprint method, in which the mold release properties from a mold having a fine concave-convex pattern used in the preparation of the intermediate stamper and the mold r...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KAIDA EIZOU, HASHIMOTO MASASHI, INAMIYA TAKATO
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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