METHOD FOR FORMING A METAL OXIDE THIN-FILM PATTERN AND PRODUCTION METHOD FOR AN LED ELEMENT USING NANOIMPRINTING
A method for forming a metal oxide thin film pattern using nanoimprinting according to one embodiment of the present invention includes: coating a photosensitive metal-organic material precursor solution on a substrate; pressurizing the photosensitive metal-organic material precursor coating layer t...
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creator | CHOI, Jun-Hyuk PARK, Seong-Je PARK, Hyeong-Ho CHOI, Dae-Geun JEONG, Jun-Ho LEE, Ji-Hye JEON, So-Hee KIM, Ki-Don KIM, Sa-Rah |
description | A method for forming a metal oxide thin film pattern using nanoimprinting according to one embodiment of the present invention includes: coating a photosensitive metal-organic material precursor solution on a substrate; pressurizing the photosensitive metal-organic material precursor coating layer to a mold patterned to have a protrusion and depression structure; forming the metal oxide thin film pattern by irradiating ultraviolet rays to the pressurized photosensitive metal-organic material precursor coating layer to cure it; and removing the patterned mold from the metal oxide thin film pattern. |
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pressurizing the photosensitive metal-organic material precursor coating layer to a mold patterned to have a protrusion and depression structure; forming the metal oxide thin film pattern by irradiating ultraviolet rays to the pressurized photosensitive metal-organic material precursor coating layer to cure it; and removing the patterned mold from the metal oxide thin film pattern.</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CINEMATOGRAPHY</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>MANUFACTURE OR TREATMENT OF NANOSTRUCTURES</subject><subject>MATERIALS THEREFOR</subject><subject>MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES</subject><subject>NANOTECHNOLOGY</subject><subject>ORIGINALS THEREFOR</subject><subject>PERFORMING OPERATIONS</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2018</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjMEKwjAQRHPxIOo_7A_0oBalx9hszUKyCXEL3kqReBIt1P_HFjx49DAM8xjeUg0exQYDTUhzPPEZNExQOwhXMghiiYuGnIeoRTAxaDYQUzBtLRQYfgyawaEBdOiRBdrLrGPNgXxMxDLNtVrc-8eYN99eKWhQalvk4dXlcehv-ZnfHcZdeSyr6nDa7v-4fAA0pDdD</recordid><startdate>20180502</startdate><enddate>20180502</enddate><creator>CHOI, Jun-Hyuk</creator><creator>PARK, Seong-Je</creator><creator>PARK, Hyeong-Ho</creator><creator>CHOI, Dae-Geun</creator><creator>JEONG, Jun-Ho</creator><creator>LEE, Ji-Hye</creator><creator>JEON, So-Hee</creator><creator>KIM, Ki-Don</creator><creator>KIM, Sa-Rah</creator><scope>EVB</scope></search><sort><creationdate>20180502</creationdate><title>METHOD FOR FORMING A METAL OXIDE THIN-FILM PATTERN AND PRODUCTION METHOD FOR AN LED ELEMENT USING NANOIMPRINTING</title><author>CHOI, Jun-Hyuk ; 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pressurizing the photosensitive metal-organic material precursor coating layer to a mold patterned to have a protrusion and depression structure; forming the metal oxide thin film pattern by irradiating ultraviolet rays to the pressurized photosensitive metal-organic material precursor coating layer to cure it; and removing the patterned mold from the metal oxide thin film pattern.</abstract><oa>free_for_read</oa></addata></record> |
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subjects | APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MATERIALS THEREFOR MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES NANOTECHNOLOGY ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TRANSPORTING |
title | METHOD FOR FORMING A METAL OXIDE THIN-FILM PATTERN AND PRODUCTION METHOD FOR AN LED ELEMENT USING NANOIMPRINTING |
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