Device for cooling samples during ion beam preparation

Device for cooling samples during ion beam preparation

The apparatus (101) has a sample table (102) receiving a sample, and a coolant receptacle containing a coolant e.g. liquid nitrogen. Thermal conduction elements (106a, 106b) connect the sample table with the coolant in a heat transmitting manner. A cooling finger (105) is connected to the coolant re...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: PFEIFER, THOMAS, WOGRITSCH, RAINER
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator PFEIFER, THOMAS
WOGRITSCH, RAINER
description The apparatus (101) has a sample table (102) receiving a sample, and a coolant receptacle containing a coolant e.g. liquid nitrogen. Thermal conduction elements (106a, 106b) connect the sample table with the coolant in a heat transmitting manner. A cooling finger (105) is connected to the coolant receptacle in a heat transmitting manner, and includes conduit through which coolant flows, where the conduit is connected with the coolant receptacle. A coolant pump controls coolant flow. A temperature measuring unit (122) measures temperature of the sample table. The coolant is selected from group of consisting of liquid nitrogen, liquefied gas and liquid air. An independent claim is also included for a method for adjusting temperature of a sample in an ion beam etching operation.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_EP2469577B1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>EP2469577B1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_EP2469577B13</originalsourceid><addsrcrecordid>eNrjZDBzSS3LTE5VSMsvUkjOz8_JzEtXKE7MLchJLVZIKS0CcTPz8xSSUhNzFQqKUgsSixJLgAI8DKxpiTnFqbxQmptBwc01xNlDN7UgPz61uCAxOTUvtSTeNcDIxMzS1NzcydCYCCUAO7ctNw</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Device for cooling samples during ion beam preparation</title><source>esp@cenet</source><creator>PFEIFER, THOMAS ; WOGRITSCH, RAINER</creator><creatorcontrib>PFEIFER, THOMAS ; WOGRITSCH, RAINER</creatorcontrib><description>The apparatus (101) has a sample table (102) receiving a sample, and a coolant receptacle containing a coolant e.g. liquid nitrogen. Thermal conduction elements (106a, 106b) connect the sample table with the coolant in a heat transmitting manner. A cooling finger (105) is connected to the coolant receptacle in a heat transmitting manner, and includes conduit through which coolant flows, where the conduit is connected with the coolant receptacle. A coolant pump controls coolant flow. A temperature measuring unit (122) measures temperature of the sample table. The coolant is selected from group of consisting of liquid nitrogen, liquefied gas and liquid air. An independent claim is also included for a method for adjusting temperature of a sample in an ion beam etching operation.</description><language>eng ; fre ; ger</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY</subject><creationdate>2016</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20161005&amp;DB=EPODOC&amp;CC=EP&amp;NR=2469577B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20161005&amp;DB=EPODOC&amp;CC=EP&amp;NR=2469577B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>PFEIFER, THOMAS</creatorcontrib><creatorcontrib>WOGRITSCH, RAINER</creatorcontrib><title>Device for cooling samples during ion beam preparation</title><description>The apparatus (101) has a sample table (102) receiving a sample, and a coolant receptacle containing a coolant e.g. liquid nitrogen. Thermal conduction elements (106a, 106b) connect the sample table with the coolant in a heat transmitting manner. A cooling finger (105) is connected to the coolant receptacle in a heat transmitting manner, and includes conduit through which coolant flows, where the conduit is connected with the coolant receptacle. A coolant pump controls coolant flow. A temperature measuring unit (122) measures temperature of the sample table. The coolant is selected from group of consisting of liquid nitrogen, liquefied gas and liquid air. An independent claim is also included for a method for adjusting temperature of a sample in an ion beam etching operation.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2016</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDBzSS3LTE5VSMsvUkjOz8_JzEtXKE7MLchJLVZIKS0CcTPz8xSSUhNzFQqKUgsSixJLgAI8DKxpiTnFqbxQmptBwc01xNlDN7UgPz61uCAxOTUvtSTeNcDIxMzS1NzcydCYCCUAO7ctNw</recordid><startdate>20161005</startdate><enddate>20161005</enddate><creator>PFEIFER, THOMAS</creator><creator>WOGRITSCH, RAINER</creator><scope>EVB</scope></search><sort><creationdate>20161005</creationdate><title>Device for cooling samples during ion beam preparation</title><author>PFEIFER, THOMAS ; WOGRITSCH, RAINER</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP2469577B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2016</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><toplevel>online_resources</toplevel><creatorcontrib>PFEIFER, THOMAS</creatorcontrib><creatorcontrib>WOGRITSCH, RAINER</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>PFEIFER, THOMAS</au><au>WOGRITSCH, RAINER</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Device for cooling samples during ion beam preparation</title><date>2016-10-05</date><risdate>2016</risdate><abstract>The apparatus (101) has a sample table (102) receiving a sample, and a coolant receptacle containing a coolant e.g. liquid nitrogen. Thermal conduction elements (106a, 106b) connect the sample table with the coolant in a heat transmitting manner. A cooling finger (105) is connected to the coolant receptacle in a heat transmitting manner, and includes conduit through which coolant flows, where the conduit is connected with the coolant receptacle. A coolant pump controls coolant flow. A temperature measuring unit (122) measures temperature of the sample table. The coolant is selected from group of consisting of liquid nitrogen, liquefied gas and liquid air. An independent claim is also included for a method for adjusting temperature of a sample in an ion beam etching operation.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng ; fre ; ger
recordid cdi_epo_espacenet_EP2469577B1
source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title Device for cooling samples during ion beam preparation
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-25T19%3A24%3A10IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=PFEIFER,%20THOMAS&rft.date=2016-10-05&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EEP2469577B1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true