A CONFIGURABLE MICROMECHANICAL DIFFRACTIVE ELEMENT WITH ANTI STICTION BUMPS

The invention relates to a micromechanical unit, in particular, an adjustable optical filter, and also a method to manufacture the unit. The unit comprises a first device layer and a second substrate layer at least partially fastened to each other, where the device layer comprises a number of reflec...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BAKKE, THOR, LACOLLE, MATTHIEU, WANG, DAG, TORSTEIN, MOE,SIGURD, TEODOR, JOHANSEN, IB-RUNE, SAGBERG, HAAKON
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS TRANSPORTING
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