A CONFIGURABLE MICROMECHANICAL DIFFRACTIVE ELEMENT WITH ANTI STICTION BUMPS

A CONFIGURABLE MICROMECHANICAL DIFFRACTIVE ELEMENT WITH ANTI STICTION BUMPS

The invention relates to a micromechanical unit, in particular, an adjustable optical filter, and also a method to manufacture the unit. The unit comprises a first device layer and a second substrate layer at least partially fastened to each other, where the device layer comprises a number of reflec...

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Hauptverfasser: BAKKE, THOR, LACOLLE, MATTHIEU, WANG, DAG, TORSTEIN, MOE,SIGURD, TEODOR, JOHANSEN, IB-RUNE, SAGBERG, HAAKON
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Sprache:eng ; fre ; ger
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MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
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creator BAKKE, THOR
LACOLLE, MATTHIEU
WANG, DAG, TORSTEIN
MOE,SIGURD, TEODOR
JOHANSEN, IB-RUNE
SAGBERG, HAAKON
description The invention relates to a micromechanical unit, in particular, an adjustable optical filter, and also a method to manufacture the unit. The unit comprises a first device layer and a second substrate layer at least partially fastened to each other, where the device layer comprises a number of reflecting elements divided between a number of non movable, fixed reflecting elements, where the fixed elements are connected with the substrate, and where a cavity is defined between the substrate and each movable element and each movable element is set up to produce a spring-loaded movement into the cavity, and where a number of dielectric spacer blocks are placed in the cavities between each movable element and the substrate to avoid electric contact between them.
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subjects MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
title A CONFIGURABLE MICROMECHANICAL DIFFRACTIVE ELEMENT WITH ANTI STICTION BUMPS
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