SILICA GLASS WITH SATURATED INDUCED ABSORPTION AND METHOD OF MAKING

A silica glass article, such as a lens in a stepper/scanner system, having saturated induced absorption at wavelengths of less than about 250 nm. Saturated induced absorption is achieved by first removing Si-O defects in the silica glass by forming silicon hydride (SiH) at such defects, and loading...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SMITH, CHARLENE M, SCHIEFELBEIN, SUSAN L
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMISTRY GLASS JOINING GLASS TO GLASS OR OTHER MATERIALS MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES METALLURGY MINERAL OR SLAG WOOL SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS
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