DEVICE FOR TREATING DISC-LIKE ARTICLES

A device for treating a disc-like article with a fluid, including elements for dispensing a fluid onto the article and a chuck for holding and rotating the article around an axis perpendicular thereto, the chuck including a base body, a drive ring, and gripping members for contacting the article at...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: OBWEGER, Rainer, WIRNSBERGER, Thomas, KUMNIG, Franz
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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