VACUUM TREATMENT APPARATUS

A transport arrangement (100) for bi-directionally transporting substrates towards and from a load lock (5) comprises a first substrate handler (1) swivelable about a first axis (A1) and with at least two first substrate carriers (1a, 1b). A second substrate handler (20) swivelable about a second ax...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DOVIDS, GERHARD, VOSER, STEPHAN
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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