MICRO-THERMISTOR GAS PRESSURE SENSOR

The invention provides an apparatus and method for precisely measuring gas pressure over a large dynamic range and with good immunity to temperature fluctuations, encompassing applications such as gas sensing, bolometer imaging and industrial process monitoring. The micro-thermistor gas pressure sen...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: VIENS, Jean-François, LE NOC, Loïc, TREMBLAY, Bruno
Format: Patent
Sprache:eng ; fre ; ger
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