SEED CRYSTAL FOR GROWTH OF SILICON CARBIDE SINGLE CRYSTAL, PROCESS FOR PRODUCING THE SAME, AND PROCESS FOR PRODUCING SILICON CARBIDE SINGLE CRYSTAL BY SUBLIMATION
There is provided a seed crystal for silicon carbide single crystal growth, which is capable of suppressing crystal defects that arise from the interface between a seed crystal and graphite, and producing a high quality silicon carbide single crystal having a low crystal defect density, with good re...
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Sprache: | eng ; fre ; ger |
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