Optical sensor for characterizing a substrate
A substrate characterization device is provided which includes an optical sensor module and a processor. The optical sensor module includes a light emitting source (84) and a light receiving detector (92) for communicating with the substrate (82) by two parallel optical fibers (86,90) and providing...
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| creator | BEACHNER, JAMES R WAYMAN, WILLIAM H LIU, CHU-HENG |
| description | A substrate characterization device is provided which includes an optical sensor module and a processor. The optical sensor module includes a light emitting source (84) and a light receiving detector (92) for communicating with the substrate (82) by two parallel optical fibers (86,90) and providing an indication of the diffusion of light through the substrate (82). The indication of the diffusion of light through the substrate is a signal provided to a processor in communication with a memory module for making a comparison of the signal generated by the optical sensor module with a reference signal to determine the quality of the substrate. |
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| language | eng ; fre ; ger |
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| subjects | CORRECTION OF TYPOGRAPHICAL ERRORS i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES LINING MACHINES MEASURING PERFORMING OPERATIONS PHYSICS PRINTING SELECTIVE PRINTING MECHANISMS STAMPS TESTING TRANSPORTING TYPEWRITERS |
| title | Optical sensor for characterizing a substrate |
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