ELECTRON BEAM IRRADIATING APPARATUS WITH MONITOR DEVICE

The electron beam irradiating apparatus with the monitoring device has an electron beam irradiating means for irradiating materials in an irradiation chamber. The monitoring device has a photographing means for imaging a lights emitted by irradiating an electron beam to the materials; a storage mean...

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Bibliographische Detailangaben
Hauptverfasser: HIKOSAKA, TOMOYUKI, EGUCHI, SHIRO, HASHIMOTO, ISAO, SUZUKI, TAKAYUKI, GOHZAKI, SATORU, HARADA, NOBUYASU, SATO, SHIGEKATSU
Format: Patent
Sprache:eng ; fre ; ger
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