Microprobe having a cantilevers array
The microprobe (1) has a set of spring cantilevers (3) each arranged along the circumference of an edge (5) of a holding element (2) at a distance (4) from the adjacent cantilevers, where the cantilevers have equal length (6). A part (8) at a free end (7) of each cantilever has a different cross sec...
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| creator | ENGL, WOLFGANG SULZBACH, THOMAS |
| description | The microprobe (1) has a set of spring cantilevers (3) each arranged along the circumference of an edge (5) of a holding element (2) at a distance (4) from the adjacent cantilevers, where the cantilevers have equal length (6). A part (8) at a free end (7) of each cantilever has a different cross sectional shape compared to that of the two adjacent cantilevers, such that the cross sections (9, 10) of each cantilever suddenly change along the length of the cantilever, where one-third length of the cantilever has maximum cross section. Each cantilever has an actuator for stimulating deflection. |
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A part (8) at a free end (7) of each cantilever has a different cross sectional shape compared to that of the two adjacent cantilevers, such that the cross sections (9, 10) of each cantilever suddenly change along the length of the cantilever, where one-third length of the cantilever has maximum cross section. 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| language | eng ; fre ; ger |
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| subjects | APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES MEASURING NANOTECHNOLOGY PERFORMING OPERATIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TESTING TRANSPORTING |
| title | Microprobe having a cantilevers array |
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