Particle-optical component

A particle-optical arrangement comprises a charged particle source for generating at least one beam (311) of charged particles; a first multi-aperture plate (613) having a plurality of apertures and a second multi-aperture plate (614) having a plurality of apertures, wherein the second multi-apertur...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GRESCHNER, JOHANN, KEMEN, THOMAS, KNIPPELMEYER, RAINER, FRITZ, GEORG, CASARES, ANTONIO, KALT, SAMUEL, BAYER, THOMAS
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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