Reverse osmosis method for preparing rinsing water containing polyvalent metal cations

Processing rinsing water from the cleaning of wet-chemically treated components, comprising at least partially metalized surface having polyvalent metal cation (Me i), comprises: passing a portion of the rinsing water (A 0) through a cross-flow filtration step (F 1) or cascading the rinsing water through number (n) of cross-flow filtration steps (F 1...F n); and displacing the portion of rinsing water (A 0) or the rinsing water (A 1... n - m) cascaded up to the m reverse osmosis steps (F 2) with an amount of water-soluble chelate-forming organic compound. Processing rinsing water from the cleaning of wet-chemically treated components, comprising at least partially metalized surface having polyvalent metal cation (Me i), comprises: passing a portion of the rinsing water (A 0) through a cross-flow filtration step (F 1) or cascading the rinsing water through number (n) of cross-flow filtration steps (F 1...F n), where each filtration step (F n) is fed with a permeate (A n - 1) of the prior filtration step (F n - 1), at least one filtration step represents reverse osmosis step (F 2), and the permeate of first reverse osmosis step does not pass through further step of another type of cross-flow filtration as the reverse osmosis; and displacing the portion of rinsing water (A 0) or the rinsing water (A 1... n - m) cascaded up to the m reverse osmosis steps with an amount of water-soluble chelate-forming organic compound having at least one phosphonate group, where the molar ratio of phosphonate group to polyvalent metal cation in the retentate of the first reverse osmosis does not exceed a value for which the specific conductivity in permeate of the first reverse osmosis step is greater than 800 mu S/cm.