Micromechanical component with reduced wear
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| creator | VON GUNTEN, STÉPHANE DR.- GLUCHE, PETER FLÖTER, ANDRÉ GRETZSCHEL, RALPH |
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| language | eng ; fre ; ger |
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| subjects | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING |
| title | Micromechanical component with reduced wear |
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