METHOD FOR REDUCING THE CONTENT IN ELEMENTS, SUCH AS BORON, IN HALOSILANES AND INSTALLATION FOR CARRYING OUT SAID METHOD

The invention relates to a method for reducing the content in elements of the third main group of the periodic system, especially in boron- and/or aluminum-containing compounds of technically pure halosilanes for producing purified halosilanes, especially high-purity chlorosilanes. The invention fur...

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Bibliographische Detailangaben

Hauptverfasser:	SCHORK, REINHOLD, MUEH, EKKEHARD, RAULEDER, HARTWIG
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
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