METHOD FOR REDUCING THE CONTENT IN ELEMENTS, SUCH AS BORON, IN HALOSILANES AND INSTALLATION FOR CARRYING OUT SAID METHOD

METHOD FOR REDUCING THE CONTENT IN ELEMENTS, SUCH AS BORON, IN HALOSILANES AND INSTALLATION FOR CARRYING OUT SAID METHOD

The invention relates to a method for reducing the content in elements of the third main group of the periodic system, especially in boron- and/or aluminum-containing compounds of technically pure halosilanes for producing purified halosilanes, especially high-purity chlorosilanes. The invention fur...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SCHORK, REINHOLD, MUEH, EKKEHARD, RAULEDER, HARTWIG
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Beschreibung
Zusammenfassung:The invention relates to a method for reducing the content in elements of the third main group of the periodic system, especially in boron- and/or aluminum-containing compounds of technically pure halosilanes for producing purified halosilanes, especially high-purity chlorosilanes. The invention further relates to an installation for carrying out said method.