SYSTEM FOR ANALYSING A LOW PRESSURE GAS BY OPTICAL EMISSION SPECTROSCOPY
The object of the invention is a system for analyzing gases which are at a pressure on the order of a secondary vacuum. The system includes a gas ionization device that includes a cathode having conducting walls defining a cylindrical volume and a disc including at least one central through hole, an...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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