SAW SENSOR

Provided is a surface acoustic wave (SAW) sensor sensing pressure, temperature, etc., by using a SAW. The SAW sensor includes: a substrate having one of its surfaces formed with a cavity having a predetermined depth; a piezoelectric plate which has piezoelectricity, so as to make a SAW, and which is...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM, TAE-HO, SEO, JAE-WOO, CHOI, DU-HWAN, LIM, SEUNG-MAN, KIM, DO-HYUNG, SHON, BYEONG-KYOO
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
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