Micromechanical thermal actuator

The present invention provides a microelectromechanical element comprising a cold beam and at least a first beam pair comprising a first beam member and a second beam member, the beam pair being coupled to said cold beam by a free end tether and configured to elongate when heated to a greater temper...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GATES, JOHN, GASPARYAN, ARMAN, SIMON, MARIA ELINA
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SWITCHES ELECTRICITY EMERGENCY PROTECTIVE DEVICES MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS RELAYS SELECTORS TRANSPORTING
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