Solid-state imaging device, method of manufacturing solid-state imaging device, and electronic apparatus

A solid-state imaging device includes a pixel section including light receiving sensors, horizontally spaced vertical transfer registers including vertical transfer channel regions and vertical transfer electrodes formed above the vertical transfer channel regions, vertically spaced horizontal trans...

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description A solid-state imaging device includes a pixel section including light receiving sensors, horizontally spaced vertical transfer registers including vertical transfer channel regions and vertical transfer electrodes formed above the vertical transfer channel regions, vertically spaced horizontal transfer registers each including a horizontal transfer channel region and horizontal transfer electrodes formed side by side in a horizontal direction above the horizontal transfer channel region and formed in the same layer as the vertical transfer electrodes, and a horizontal-to-horizontal transfer portion formed between adjacent two of the horizontal transfer registers and including a horizontal-to-horizontal transfer channel region interconnecting respective parts of the horizontal transfer channel regions positioned under the horizontal transfer electrodes to which the transfer drive pulses having different phases are applied, and a horizontal-to-horizontal transfer electrode formed above the horizontal-to-horizontal transfer channel region in the same layer as both the vertical transfer electrodes and the horizontal transfer electrodes.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PICTORIAL COMMUNICATION, e.g. TELEVISION
SEMICONDUCTOR DEVICES
title Solid-state imaging device, method of manufacturing solid-state imaging device, and electronic apparatus
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