EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER

Disclosed herein are systems and methods for extending one or both of the discharge electrodes in a transverse discharge gas laser chamber in which one or both the electrodes are subject to a dimensional change due to erosion. Electrode extension can be performed to increase the chamber life, increa...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SANDSTROM, RICHARD, L, UJAZDOWSKI, RICHARD, C, CHUNG, TAE, H
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES USING STIMULATED EMISSION ELECTRICITY
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