SENSOR WITH COMPOSITE DIAPHRAGM CONTAINING CARBON NANOTUBES OR SEMICONDUCTING NANOWIRES

A sensor preferably capable of high resolution sensing over a large operating range includes a composite diaphragm containing nanotubes or nanowires. The nanotubes or nanowires preferably form a mat that is embedded in insulating material, such as high dielectric or insulating thin films. The nanotu...

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Bibliographische Detailangaben
1. Verfasser: CHAKRABORTY, Swapan
Format: Patent
Sprache:eng ; fre ; ger
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