MEMS ACTUATORS AND SWITCHES
Microelectromechanical (MEMS) structures and switches employing movable actuators wherein particular ones of which move perpendicular to an underlying substrate and particular others move in a direction substantially parallel to the underlying substrate thereby providing more positive actuation.
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| creator | LU, JUN MÉNARD, STÉPHANE GONON, NICOLAS |
| description | Microelectromechanical (MEMS) structures and switches employing movable actuators wherein particular ones of which move perpendicular to an underlying substrate and particular others move in a direction substantially parallel to the underlying substrate thereby providing more positive actuation. |
| format | Patent |
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MÉNARD, STÉPHANE ; GONON, NICOLAS</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP2126942B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2014</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SWITCHES</topic><topic>ELECTRICITY</topic><topic>EMERGENCY PROTECTIVE DEVICES</topic><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>PERFORMING OPERATIONS</topic><topic>RELAYS</topic><topic>SELECTORS</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>LU, JUN</creatorcontrib><creatorcontrib>MÉNARD, STÉPHANE</creatorcontrib><creatorcontrib>GONON, NICOLAS</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>LU, JUN</au><au>MÉNARD, STÉPHANE</au><au>GONON, NICOLAS</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MEMS ACTUATORS AND SWITCHES</title><date>2014-05-21</date><risdate>2014</risdate><abstract>Microelectromechanical (MEMS) structures and switches employing movable actuators wherein particular ones of which move perpendicular to an underlying substrate and particular others move in a direction substantially parallel to the underlying substrate thereby providing more positive actuation.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre ; ger |
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| source | esp@cenet |
| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SWITCHES ELECTRICITY EMERGENCY PROTECTIVE DEVICES MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS RELAYS SELECTORS TRANSPORTING |
| title | MEMS ACTUATORS AND SWITCHES |
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