METHOD FOR CALIBRATING THE X-Y POSITIONING OF A POSITIONING TOOL, AND APPARATUS WITH SUCH A POSITIONING TOOL

The invention relates to a method for calibrating the x-y positioning of a positioning tool (1), a method for placing a component (3) on a substrate (4), an apparatus with a positioning tool (1) and with an image detection system (2), and a calibration apparatus (100) for calibrating the x-y positio...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ERNST, URBAN, SCHUSTER, JOHANNES, MARTE, ANDREAS
Format: Patent
Sprache:eng ; fre ; ger
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